Enhancement-mode in 0.52 Al 0.48 As= in 0.53 Ga 0.47 As=inp Hemt Utilising Ir=ti=pt=au Gate
نویسنده
چکیده
InAlAs=InGaAs=InP enhancement-mode high electron mobility transistors utilising Ir=Ti=Pt=Au gates have been fabricated and compared to devices with conventional Pt=Ti=Pt=Au gates. Enhancement-mode operation with threshold voltage of 134 mV was achieved for Ir-based devices with 0.25 mm gate length after a short anneal at 250 C. No change was observed in the magnitude of gm before and after anneal, indicating low metal diffusivity and high thermal stability for Ir-based devices.
منابع مشابه
High mobility In[subscript 0.53]Ga[subscript 0.47]As quantum-well metal oxide semiconductor field effect transistor structures Citation
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